Pipeline heater

Benefits

Many semiconductor device manufacturing processes are performed under a vacuum environment. While modern semiconductor manufacturing processes use more reactive precursors to lower the reaction temperature, reduce the thermal budget, and achieve high quality films, byproduct generation has created serious issues for process management. The recent adoption of atomic layer deposition has made the effluent management even more challenging due to unreacted precursors that are sent to vacuum foreline directly. This leads to significant problems such as shortened pump life, valve malfunction, pressure gauge drift, poor system control, and high particles; these in turn reduce tool productivity due to frequent tool preventive maintenance and low process yield.
We provide technical consulting services on semiconductor manufaturing processes. Specifically, we focus on helping the customer:
- Identify the source of problematic processes
- Optimize vacuum systems to ensure efficient system performance
- Design solutions for optimal effluent management
- Develop critical components to address effluent-related complications

Specifications

Power Source: Electric
Voltage: 12-220V
Power : ≤ 2W/cm2
Material: silicone rubber with etching film

Accessories optional

Vacuum foreline heater or gasline heater always co-works with temperature controllers. We provide many choices to make accurate heating control and troubleshooting.

Hotlong, (Jiangyin Huilong Electric Heating Appliance Co., Ltd.) based in China’s famous Yangtze River Delta industrial area, establishes 3 manufactories, 3 research and development centers and the worldwide sales network since 2002, who aims to provide the best quality and utmost integrity you deserve.

Hotlong not only focuses on product research and development, but also independently develops modern management system, realizing the integrated management mode from production to sale. We believe the efficient management mode is the foundation of the long-term development of enterprise.

Our products have many certifications which including UL, CE, I A T F 1 6 9 4 9, I S O 1 8 0 0 1 and I S O 9 0 0 1.

As the efforts of all Hotlong staffs, we are so proud and honor to achieve over 30 patents.

The mission of Hotlong is to help you we serve become more successful in your business. We aim to provide you the best solutions and ensure you get the best service.

We are driven to serve your company not as just a key supplier but as a valued partner.

Hotlong-Flexible thinking creates the future! Looking forward to cooperating with you!